A pressure sensor, comprising the double-ended tuning fork type piezoelectric resonator according to claim 1 and a first diaphragm substrate and a second diaphragm substrate that air-tightly seal the two arm portions by respectively being bonded to a front surface side and a back surface side of the double-ended tuning fork type piezoelectric resonator, wherein the first and the second diaphragm substrates are respectively bonded to a front surface and a back surface of the annular linking piece of the double-ended tuning fork type piezoelectric resonator to house the two arm portions in an air-tight space formed in an internal space of the annular linking piece without making contact with an inside wall of the air-tight space.ģ. A double-ended tuning fork type piezoelectric resonator, comprising: a piezoelectric element having two arm portions that are disposed in parallel and apart from each other, a first supporting portion that support one ends of each of the arm portions, and a second supporting portion that support the other ends of each of the arm portions and an exciting electrode formed on a surface of each of the arm portions, wherein an annular linking piece is provided to link the first and the second supporting portions to dispose the two arm portions in an internal space of the annular linking piece.Ģ. Package for a sensing element, retaining device for retaining the sensing element in the package, sensor, and methods of making the sameĬatalyst Deterioration Detecting Apparatus of Vehicle Internal Combustion Engineġ. SCALE FOR DETERMINING A MASS FLOW RATE IN ACCORDANCE WITH THE DIFFERENTIAL PRINCIPLEĪPPARATUS AND METHOD FOR DISCONTINUOUS FILTRATION
In the resonator, an annular linking piece 8 is provided to link the first and the second supporting portions to dispose the two arm portions in an internal space of the annular linking piece.Īpparatus, System and Method for Measuring the Properties of a Corrosive Liquidĭevice for measuring a level of fluid in a container To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element.Ī double-ended tuning fork type piezoelectric resonator includes: a piezoelectric element 3 having two arm portions 4 disposed in parallel and apart from each other, and a first supporting portion 5 and a second supporting portion 6 that respectively support one ends and the other ends of each of the arm portions and an exciting electrode 7 formed on a surface of each arm portion.
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